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Buchcover Silicon Carbide Microsystems for Harsh Environments

Silicon Carbide Microsystems for Harsh Environments

Muthu Wijesundara

Buchcover Silicon Carbide Microsystems for Harsh Environments

Silicon Carbide Microsystems for Harsh Environments

Muthu Wijesundara

Buchcover MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook

Buchcover MEMS Reliability

MEMS Reliability

Allyson L. Hartzell

Buchcover Radioisotope Thin-Film Powered Microsystems

Radioisotope Thin-Film Powered Microsystems

Rajesh Duggirala

Buchcover Radioisotope Thin-Film Powered Microsystems

Radioisotope Thin-Film Powered Microsystems

Rajesh Duggirala

Buchcover RF MEMS Switches and Integrated Switching Circuits

RF MEMS Switches and Integrated Switching Circuits

Buchcover Multi-Wafer Rotating MEMS Machines

Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines

Buchcover Photonic Microsystems

Photonic Microsystems

Micro and Nanotechnology Applied to Optical Devices and Systems

Buchcover MEMS Vibratory Gyroscopes

MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness

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