Reihe MicrosystemseBooks × Dynamics of Microelectromechanical Systems Nicolae LobontiuSpringer USeBook201453,49 € Materials & Process Integration for MEMS Springer USeBook2013149,79 € Microfluidics and BioMEMS Applications Springer USeBook2013149,79 € Micromachined Mirrors Robert ConantSpringer USeBook201396,29 € Scanning Probe Lithography Hyongsok T. SohSpringer USeBook201396,29 € Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators Gerhard LammelSpringer USeBook2013149,79 € Heat Convection in Micro Ducts Yitshak ZoharSpringer USeBook201396,29 € Optimal Synthesis Methods for MEMS Springer USeBook2012149,79 € Microscale Heat Conduction in Integrated Circuits and Their Constituent Films Y. Sungtaek JuSpringer USeBook201296,29 € Microcantilevers for Atomic Force Microscope Data Storage Benjamin W. ChuiSpringer USeBook201296,29 €21 Treffer 1 2 3