Reihe Microtechnology and MEMSArno Lenk × Electromechanical Systems in Microtechnology and MechatronicsElectrical, Mechanical and Acoustic Networks, their Interactions and ApplicationsArno LenkSpringer BerlinSoftcover2012 Electromechanical Systems in Microtechnology and MechatronicsElectrical, Mechanical and Acoustic Networks, their Interactions and ApplicationsArno LenkSpringer BerlinHardcover2010 Electromechanical Systems in Microtechnology and MechatronicsElectrical, Mechanical and Acoustic Networks, their Interactions and ApplicationsArno LenkSpringer BerlineBook2010