Reihe Microtechnology and MEMSD. Lange × CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlineBook201396,29 € CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlinSoftcover2010106,99 € CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlinHardcover2002106,99 €