Reihe Microtechnology and MEMSD. Lange × CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlineBook2013 CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlinSoftcover2010 CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlinHardcover2002