Reihe Microtechnology and MEMSRüdiger G. Ballas × Piezoelectric Multilayer Beam Bending ActuatorsStatic and Dynamic Behavior and Aspects of Sensor IntegrationRüdiger G. BallasSpringer BerlinSoftcover2010 Piezoelectric Multilayer Beam Bending ActuatorsStatic and Dynamic Behavior and Aspects of Sensor IntegrationRüdiger G. BallasSpringer BerlineBook2007 Piezoelectric Multilayer Beam Bending ActuatorsStatic and Dynamic Behavior and Aspects of Sensor IntegrationRüdiger G. BallasSpringer BerlinHardcover2007