Reihe Springer Series in Advanced MicroelectronicsPilar Gonzalez Ruiz × Poly-SiGe for MEMS-above-CMOS Sensors Pilar Gonzalez RuizSpringer NetherlandSoftcover2015106,99 € Poly-SiGe for MEMS-above-CMOS Sensors Pilar Gonzalez RuizSpringer NetherlandHardcover2013106,99 € Poly-SiGe for MEMS-above-CMOS Sensors Pilar Gonzalez RuizSpringer NetherlandeBook201396,29 €