Microscale Heat Conduction in Integrated Circuits and Their Constituent Films

Inhaltsverzeichnis

• 1 Introduction.
• 1.1 Thermal Issues in Integrated Circuit Elements.
• 1.2 Scope of Research.
• 1.3 Book Overview.
• 2 Review of Microscale Thermometry Techniques.
• 2.1 Electrical Methods.
• 2.2 Optical Methods.
• 3 High Spatial and Temporal Resolution Thermometry.
• 3.1 Thermoreflectance Thermometry Technique.
• 3.2 Thermal Characterization of Silicon-on-Insulator High-Voltage Transistors.
• 3.3 Thermal Characterization of Interconnects.
• 4 Thermal Properties of Amorphous Dielectric Films.
• 4.1 Thermal Characterization Techniques for Dielectric Films.
• 4.2 Heat Transport in Amorphous Silicon Dioxide.
• 5 Heat Conduction in Crystalline Silicon Films.
• 5.1 Phonon Dispersion and its Implication on the Estimation of the Phonon Mean Free Path.
• 5.2 Measurements of In-Plane Thermal Conductivities of Silicon Films.
• 5.3 Heat Conduction in Semiconductors at High Temperatures.
• 5.4 Prediction of the In-Plane Thermal Conductivity of Silicon Thin Films.
• 5.5 Simplified Phonon Transport Equations Accounting for Phonon Dispersion.
• 5.6 Hot Phonon Effects.
• 6 Summary and Recommendations.
• 6.1 Atomistic Simulations of Heat Transport.
• 6.2 Thermal Conductivities of Nanostructures.
• 6.3 Detailed Simulations of Semiconductor Device.
• A Uncertainty Analysis.
• A.1 Uncertainly in the Temperature Rise.
• A.2 Uncertainly in the Thermal Properties of Dielectric Films.
• A.3 Uncertainly in the In-Plane Thermal Conductivity of Thin Films.