From the Foreword:
The two most valuable features of this major reference work are the breadth of material and the depth of the topics covered. Each volume comprehensively treats a significant and specific subject area of fundamental importance to MEME/NEMS.... Collectively, this material provides tremendous resources for emerging design, fabrication/manufacturing techniques and applications of MEMS/NEMS and MOEMS.... Therefore, the energing techniques, applications, and examples of MEMS/NEMS collected by Professor Leondes in this work provide a wealth of practical ideas and methodologies designed to trigger the development of innovation. The contributors in this major reference work clearly reveal the effectiveness and great significance of the techniques available and with further development the essential role that they will play in the future.
Xuan F Zha
National Institute of Standards and Technology
Gaithersburg, Maryland, USA
July 30, 2005
Mems/Nems
(1) Handbook Techniques and Applications Design Methods, (2) Fabrication Techniques, (3) Manufacturing Methods, (4) Sensors and Actuators, (5) Medical Applications and MOEMS
herausgegeben von Cornelius T. LeondesThis significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
