Transducers ’01 Eurosensors XV | The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany | ISBN 9783540421504

Transducers ’01 Eurosensors XV

The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany

herausgegeben von Ernst Obermeier

Transducers ’01 Eurosensors XV

The 11th International Conference on Solid-State Sensors and Actuators June 10 – 14, 2001 Munich, Germany

herausgegeben von Ernst Obermeier

The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.