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![]( "Buchcover ISBN 9783662308882")
Sputtering by Particle Bombardment I
Physical Sputtering of Single-Element Solids
herausgegeben von R. BehrischInhaltsverzeichnis
- and overview.
- Sputtering by ion bombardment theoretical concepts.
- Theoretical aspects of monocrystal sputtering.
- Sputtering yield measurements.
- Sputtering yields of single crystalline targets.
