Emerging Technologies for In Situ Processing

Inhaltsverzeichnis

• 1. In-Situ Processing Combining MBE, Lithography and Ion-Implantation.
• 2. Motivations and Early Demonstrations for In-Situ Processings For III-V Semiconductor Devices.
• 3. Laser Etching and Microelectronic Applications.
• 4. Laser-Induced Chemical Processing of Materials.
• 5. High Technology Manufacturing: Critical Issues for the Future.
• 6. Ultra High Vacuum Processing: MBE.
• 7. Epitaxial Growth of III-V Materials on Implanted III-V Substrates.
• 8. Mechanisms of Laser-Induced Deposition from the Gas Phase.
• 9. Time Resolved Measurements in the Thermally Assisted Photolytic Laser Chemical Vapor Deposition of Platinum.
• 10. Excimer Laser Projection Patterning.
• 11. Excimer Laser Patterning and Etching of Metals.
• 12. Ion Projection Lithography.
• 13. UV Light-Assisted Deposition of A1 on Si from TMA.
• 14. E-Beam Induced Decomposition of Inorganic Solids.
• 15. Electronic Connection Through Silicon Wafers.
• 16. The Development and Use of Novel Precursors for Photolytic Deposition of Dielectric Films.
• 17. Focused Ion Beam Induced Deposition.
• 18. Laser-Induced Metal Deposition for Clear Defect Repair Work on X-Ray Masks.
• 19. Confirmation of the Wavelength Dependence of Silicon Oxidation Induced By Visible Radiation.
• 20. Focused Ion Beam Technology and Applications.
• 21. Laser Direct Writing for Device Applications.
• 22. Laser-Induced Photoetching of Semiconductors with Chlorine.
• 23. Recent Advances in Photo-Epitaxy for Infrared Detector Fabrication.
• 24. Synthesis and Characterization of Laser Driven Powders.
• 25. Physical Properties of Laser Written Chromium Oxide Thin Films.
• 26. UV Laser Induced Oxidation of Silicon in Solid and Liquid Phase Regime.
• 27. Laser Assisted Plasma Etching of Silicon Dioxide.
• 28. Nd: Yag Laser Processing for Circuit modification and DirectWriting of Silicon Conductors.
• 29. Study of Excimer laser Enhanced Etching of Copper and Silicon With (SUB) Monolayer Coverages of Chlorine.
• 30. Surface Chemical Probes and Their Application to the Study of In Situ Semicmductor Processing.