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Buchcover - Principles of Microelectromechanical Systems - ISBN 978-0-470-64966-4
„It is ideal for radio frequency/electronics/sensor specialistswho, for design purposes, would like to forego numerical nonlinearmechanical simulations. The closed-form solution approach will alsoappeal to device designers interested in performing large-scaleparametric analysis.“ (PCBDesign007, 22 February 2011)
Principles of Microelectromechanical Systems
von Ki Bang LeeThe building blocks of MEMS design through closed-formsolutions
Microelectromechanical Systems, or MEMS, is the technology ofvery small systems; it is found in everything from inkjet printersand cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approachand closed-form solutions to micromechanical problems, which havebeen recently developed by the author and go beyond what isavailable in other texts. The closed-form solutions allow thereader to easily understand the linear and nonlinear behaviors ofMEMS and their design applications.
Beginning with an overview of MEMS, the opening chapter alsopresents dimensional analysis that provides basic dimensionlessparameters existing in large- and small-scale worlds. The book thenexplains microfabrication, which presents knowledge on the commonfabrication process to design realistic MEMS. From there, coverageincludes:
* Statics/force and moment acting on mechanical structures instatic equilibrium
* Static behaviors of structures consisting of mechanicalelements
* Dynamic responses of the mechanical structures by the solving oflinear as well as nonlinear governing equations
* Fluid flow in MEMS and the evaluation of damping force acting onthe moving structures
* Basic equations of electromagnetics that govern the electricalbehavior of MEMS
* Combining the MEMS building blocks to form actuators and sensorsfor a specific purpose
All chapters from first to last use a unified approach in whichequations in previous chapters are used in the derivations ofclosed-form solutions in later chapters. This helps readers toeasily understand the problems to be solved and the derivedsolutions. In addition, theoretical models for the elements andsystems in the later chapters are provided, and solutions for thestatic and dynamic responses are obtained in closed-forms.
This book is designed for senior or graduate students inelectrical and mechanical engineering, researchers in MEMS, andengineers from industry. It is ideal for radiofrequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to devicedesigners interested in performing large-scale parametricanalysis.
Microelectromechanical Systems, or MEMS, is the technology ofvery small systems; it is found in everything from inkjet printersand cars to cell phones, digital cameras, and medical equipment. This book describes the principles of MEMS via a unified approachand closed-form solutions to micromechanical problems, which havebeen recently developed by the author and go beyond what isavailable in other texts. The closed-form solutions allow thereader to easily understand the linear and nonlinear behaviors ofMEMS and their design applications.
Beginning with an overview of MEMS, the opening chapter alsopresents dimensional analysis that provides basic dimensionlessparameters existing in large- and small-scale worlds. The book thenexplains microfabrication, which presents knowledge on the commonfabrication process to design realistic MEMS. From there, coverageincludes:
* Statics/force and moment acting on mechanical structures instatic equilibrium
* Static behaviors of structures consisting of mechanicalelements
* Dynamic responses of the mechanical structures by the solving oflinear as well as nonlinear governing equations
* Fluid flow in MEMS and the evaluation of damping force acting onthe moving structures
* Basic equations of electromagnetics that govern the electricalbehavior of MEMS
* Combining the MEMS building blocks to form actuators and sensorsfor a specific purpose
All chapters from first to last use a unified approach in whichequations in previous chapters are used in the derivations ofclosed-form solutions in later chapters. This helps readers toeasily understand the problems to be solved and the derivedsolutions. In addition, theoretical models for the elements andsystems in the later chapters are provided, and solutions for thestatic and dynamic responses are obtained in closed-forms.
This book is designed for senior or graduate students inelectrical and mechanical engineering, researchers in MEMS, andengineers from industry. It is ideal for radiofrequency/electronics/sensor specialists who, for design purposes, would like to forego numerical nonlinear mechanical simulations. The closed-form solution approach will also appeal to devicedesigners interested in performing large-scale parametricanalysis.
