Chemistry in Microelectronics
herausgegeben von Yannick Le TiecMicroelectronics is a complex world where many sciences need tocollaborate to create nano-objects: we need expertise inelectronics, microelectronics, physics, optics and mechanics alsocrossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fieldsfrom materials, chemicals, gases, liquids or salts, the basics ofreactions and equilibrium, to the optimized cleaning of surfacesand selective etching of specific layers. In addition, over recentdecades, the size of the transistors has been drastically reducedwhile the functionality of circuits has increased. This bookconsists of five chapters covering the chemicals and sequences usedin processing, from cleaning to etching, the role and impact oftheir purity, along with the materials used in „Front End Ofthe Line“ which corresponds to the heart and performance ofindividual transistors, then moving on to the „Back End Ofthe Line“ which is related to the interconnection of all thetransistors. Finally, the need for specific functionalization alsorequires key knowledge on surface treatments and chemicalmanagement to allow new applications.
Contents
1. Chemistry in the „Front End of the Line“ (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick LeTiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-HenriHaumesser, Carole Pernel, Jeffery Butterbaugh, SylvainMaîtrejean and Didier Louis.
3. The Chemistry of Wet Surface Preparation: Cleaning, Etching andDrying, Yannick Le Tiec and Martin Knotter.
4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, CatherinePeyne and Patrick Valenti.
5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and FrancoiseVinet.
About the Authors
Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop theadvanced 14 nm CMOS node and the FDSOI technology. He helddifferent technical positions from the advanced 300 mm SOI CMOSpilot line to different assignments within SOITEC for advancedwafer development and later within INES to optimize solar cellramp-up and yield. He has been part of the ITRS Front End technicalworking group at ITRS since 2008.
Contents
1. Chemistry in the „Front End of the Line“ (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick LeTiec.
2. Chemistry in Interconnects, Vincent Jousseaume, Paul-HenriHaumesser, Carole Pernel, Jeffery Butterbaugh, SylvainMaîtrejean and Didier Louis.
3. The Chemistry of Wet Surface Preparation: Cleaning, Etching andDrying, Yannick Le Tiec and Martin Knotter.
4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, CatherinePeyne and Patrick Valenti.
5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and FrancoiseVinet.
About the Authors
Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop theadvanced 14 nm CMOS node and the FDSOI technology. He helddifferent technical positions from the advanced 300 mm SOI CMOSpilot line to different assignments within SOITEC for advancedwafer development and later within INES to optimize solar cellramp-up and yield. He has been part of the ITRS Front End technicalworking group at ITRS since 2008.
