Introduction to Microfabrication

This accessible text is now fully revised and updated, providing anoverview of fabrication technologies and materials needed torealize modern microdevices. It demonstrates how commonmicrofabrication principles can be applied in differentapplications, to create devices ranging from nanometer probe tipsto meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latestdevelopments in wafer engineering, patterning, thin films, surfacepreparation and bonding are covered.
This second edition includes:
* expanded sections on MEMS and microfluidics related fabricationissues
* new chapters on polymer and glass microprocessing, as well asserial processing techniques
* 200 completely new and 200 modified figures
* more coverage of imprinting techniques, process integration andeconomics of microfabrication
* 300 homework exercises including conceptual thinkingassignments, order of magnitude estimates, standard calculations, and device design and process analysis problems
* solutions to homework problems on the complementary website, aswell as PDF slides of the figures and tables within the book
With clear sections separating basic principles from moreadvanced material, this is a valuable textbook for seniorundergraduate and beginning graduate students wanting to understandthe fundamentals of microfabrication. The book also serves as ahandy desk reference for practicing electrical engineers, materialsscientists, chemists and physicists alike.
www. wiley. com/go/Franssila_Micro2e