Digital Holography for MEMS and Microsystem Metrology

Approaching the topic of digital holography from the practicalperspective of industrial inspection, Digital Holography forMEMS and Microsystem Metrology describes the process ofdigital holography and its growing applications for MEMScharacterization, residual stress measurement, design andevaluation, and device testing and inspection. Asundi also providesa thorough theoretical grounding that enables the reader tounderstand basic concepts and thus identify areas where thistechnique can be adopted. This combination of both practical andtheoretical approach will ensure the book's relevance and appeal toboth researchers and engineers keen to evaluate the potential ofdigital holography for integration into their existing machines andprocesses. * Addresses particle characterization where digital holographyhas proven capability for dynamic measurement of particles in 3Dfor sizing and shape characterization, with applications inmicrofluidics as well as crystallization and aerosol detectionstudies. * Discusses digital reflection holography, digital transmissionholography, digital in-line holography, and digital holographictomography and applications. * Covers other applications including micro-optical anddiffractive optical systems and the testing of these components, and bio-imaging.