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Reihe Microsystems

Buchcover Optimal Synthesis Methods for MEMS

Optimal Synthesis Methods for MEMS

Buchcover Micromachined Mirrors

Micromachined Mirrors

Buchcover Heat Convection in Micro Ducts

Heat Convection in Micro Ducts

Buchcover Microfluidics and BioMEMS Applications

Microfluidics and BioMEMS Applications

Buchcover Materials & Process Integration for MEMS

Materials & Process Integration for MEMS

Buchcover Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

Buchcover Scanning Probe Lithography

Scanning Probe Lithography

Hyongsok T. Soh

Buchcover Microscale Heat Conduction in Integrated Circuits and Their Constituent Films

Microscale Heat Conduction in Integrated Circuits and Their Constituent Films

Buchcover Microfabrication in Tissue Engineering and Bioartificial Organs

Microfabrication in Tissue Engineering and Bioartificial Organs

Sangeeta N. Bhatia

Buchcover Micromachined Ultrasound-Based Proximity Sensors

Micromachined Ultrasound-Based Proximity Sensors

Mark R. Hornung

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