Reihe Microtechnology and MEMS Shape Memory Microactuators Manfred KohlSpringer BerlinSoftcover2010 CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlinSoftcover2010 Micromechanical Photonics Hiroo UkitaSpringer BerlinSoftcover2010 Fast Simulation of Electro-Thermal MEMSEfficient Dynamic Compact ModelsTamara BechtoldSpringer BerlinSoftcover2010 Capillary Forces in MicroassemblyModeling, Simulation, Experiments, and Case StudyPierre LambertSpringer USSoftcover2010 CMOS Hotplate Chemical Microsensors Markus GrafSpringer BerlinSoftcover2010 Thermal Transport for Applications in Micro/Nanomachining Basil T. WongSpringer BerlinSoftcover2010 Piezoelectric Multilayer Beam Bending ActuatorsStatic and Dynamic Behavior and Aspects of Sensor IntegrationRüdiger G. BallasSpringer BerlinSoftcover2010 Force Sensors for Microelectronic Packaging Applications Jürg SchwizerSpringer BerlinSoftcover2010 CCD Image Sensors in Deep-UltravioletDegradation Behavior and Damage MechanismsFlora LiSpringer BerlinSoftcover201078 Treffer 1 2 3 4 5 6 7 8