Reihe Microtechnology and MEMS Integrated Chemical Microsensor Systems in CMOS Technology Andreas HierlemannSpringer BerlinHardcover2005160,49 € Force Sensors for Microelectronic Packaging Applications Jürg SchwizerSpringer BerlinHardcover2004106,99 € Shape Memory Microactuators Manfred KohlSpringer BerlinHardcover2004160,49 € Silicon Microchannel Heat SinksTheories and PhenomenaLian ZhangSpringer BerlinHardcover2003106,99 € Laser Diode Microsystems Hans ZappeSpringer BerlinHardcover2003160,49 € Micromachines as Tools for Nanotechnology Springer BerlinHardcover2003160,49 € Modelling of Microfabrication Systems Raja NassarSpringer BerlinHardcover2003160,49 € CMOS Cantilever Sensor SystemsAtomic Force Microscopy and Gas Sensing ApplicationsD. LangeSpringer BerlinHardcover2002106,99 € Mechanical Microsensors M. ElwenspoekSpringer BerlinHardcover2000213,99 €79 Treffer 1 2 3 4 5 6 7 8