Shape and Functional Elements of the Bulk Silicon Microtechnique von Joachim Frühauf | A Manual of Wet-Etched Silicon Structures | ISBN 9783540221098

Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

von Joachim Frühauf
Buchcover Shape and Functional Elements of the Bulk Silicon Microtechnique | Joachim Frühauf | EAN 9783540221098 | ISBN 3-540-22109-3 | ISBN 978-3-540-22109-8

Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

von Joachim Frühauf
Systematic manual of bulk silicon microtechniques Includes supplementary material: sn. pub/extras