Shape and Functional Elements of the Bulk Silicon Microtechnique von Joachim Frühauf | A Manual of Wet-Etched Silicon Structures | ISBN 9783642060489

Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

von Joachim Frühauf
Buchcover Shape and Functional Elements of the Bulk Silicon Microtechnique | Joachim Frühauf | EAN 9783642060489 | ISBN 3-642-06048-X | ISBN 978-3-642-06048-9

Shape and Functional Elements of the Bulk Silicon Microtechnique

A Manual of Wet-Etched Silicon Structures

von Joachim Frühauf
Systematic manual of bulk silicon microtechniques Includes supplementary material: sn. pub/extras